FeliS

A hybrid pixel detector for scanning electron microscopy (SEM). It mounts inside the SEM chamber and enables 3D electron diffraction (3D-ED) and 4D-STEM, bringing crystal-structure determination and orientation mapping of electron-transparent samples to nanometer-scale resolution while keeping all SEM functions available.

The Detectors Behind your discovery!

Designed for Precision, Performance, and Reliability

FeliS is a hybrid pixel detector that mounts inside the SEM chamber and enables transmission electron diffraction. This supports crystal-structure determination and orientation mapping of electron-transparent samples, from nanoparticles and 2D materials to thin biological specimens, at nanometer-scale resolution, without removing other SEM functions.

Built on the Medipix3 and Timepix3 ASICs from the CERN Medipix collaboration, FeliS combines zero-noise single-electron counting with high-speed, event-based detection. Frame-less acquisition records only meaningful electron interactions, which improves dataset completeness and structure-determination accuracy and keeps data volumes manageable. A motorised retractable lid provides dual-beam compatibility, and open data export works with the tools the community already uses.

Key features

Performance Highlights & Applications

3D Electron Diffraction (3D-ED)

Crystal-structure determination of nanoparticles, 2D materials, and beam-sensitive specimens directly in the SEM.

4D-STEM in SEM

High-speed diffraction mapping for strain, orientation, phase, and electric-field analysis.

Orientation & Phase Mapping

Crystallographic orientation mapping of electron-transparent samples at nanometer-scale resolution.

EBSD & Reflection-Mode Analysis

Fast, high-dynamic-range crystallographic mapping with event-based detection.

Low-Dose Imaging & Diffraction

Characterization of beam-sensitive materials such as polymers, soft matter, and thin biological specimens.

Correlative & Dual-Beam Workflows

3D-ED and 4D-STEM alongside EDS, BSE, EBSD, and FIB, with no chamber venting required.